Contract Awarded For Silicon Deep Reactive Ion Etcher (si Drie)
dtu Nanolab Requires A Silicon Deep Reactive Ion Etcher (si Drie) To Become Its New Primary Instrument For 150 Mm Wafer Processing. Delivery Is Expected No Later Than Q4 2026. The Instrument
TK ID 524610664
Document Type
Contract Awards
Tender Summary
Contract Awarded For Silicon Deep Reactive Ion Etcher (si Drie)
dtu Nanolab Requires A Silicon Deep Reactive Ion Etcher (si Drie) To Become Its New Primary Instrument For 150 Mm Wafer Processing. Delivery Is Expected No Later Than Q4 2026. The Instrument