Contract Awarded For Beol Etch Platform
the Purchase Of A Device For Removing Photoresis Layers At High Temperature Or A New Beol Etch Cluster. • 300mm Dry Etch/strip Platform With 3 Process Modules As Described Below: • Metal Dry Etcher Suitable For Meta
TK ID 521211717
Document Type
Contract Awards
Tender Summary
Contract Awarded For Beol Etch Platform
the Purchase Of A Device For Removing Photoresis Layers At High Temperature Or A New Beol Etch Cluster. • 300mm Dry Etch/strip Platform With 3 Process Modules As Described Below: • Metal Dry Etcher Suitable For Meta